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PP系列用于雙坐標(biāo)測(cè)量
|
Model |
Accuracy grade |
Substrate and mounting |
Interpolations error |
Measuring length |
|
± 2 μm |
Glass grid plate, |
± 12 nm |
Measuring range 68x68mm |
PP 281
|
|
PP 281 R |
|
Measuring standard Coefficient of linear expansion |
Two-coordinate TITANID phase grating on glass; grating period 8 μm αtherm ? 8 · 10–6 K–1 |
|
Accuracy grade |
±2 μm |
|
Measuring range |
68 mm x 68 mm, other measuring ranges upon request |
|
Reference marks1) |
One reference mark in each axis, 3 mm after beginning of measuring length |
|
Interface |
1 VPP |
|
Signal period |
4 μm |
|
Cutoff frequency –3 dB |
≥ 300 kHz |
|
Traversing speed |
≤ 72 m/min |
|
Interpolation error Position noise RMS |
±12 nm 2 nm (450 kHz)2) |
|
Electrical connection |
0.5 m cable with 15-pin D-sub connector (male); interface electronics in the connector |
|
Cable length |
See interface description, but ≤ 30 m (with HEIDENHAIN cable) |
|
Voltage supply |
DC 5 V ±0.25 V |
|
Current consumption |
< 185 mA per axis |
|
Vibration 55 Hz to 2000 Hz Shock 11 ms |
≤ 80 m/s2 (EN 60 068-2-6) ≤ 100 m/s2 (EN 60 068-2-27) |
|
Operating temperature |
0 °C to 50 °C |
|
Mass Scanning head Grid plate Connecting cable Connector |
170 g (without cable) 75 g 37 g/m 140 g |
|
1) The reference mark signal deviates in its zero crossovers from the interface specification (see Mounting Instructions) 2) With –3 dB cutoff frequency of the subsequent electronics |
|
