Yaskawa SGMCS-1CR3A-YA23 20kW AC Servo Motor 1080-00633
MKS ASTRONex Remote Plasma Source AX7685-20-C Rev.B Reb
MKS ASTRONex Remote Plasma Source AX7685-20-R-C Rev.B 0
KLA-Tencor SP1 Lens Module 0057637-000 Rev.AB working 0
AMAT Applied Materials P5000 Mini-Controller 0010-76036
Daihen RF Generator AGA-50B DGP-120A2 Working
Edwards STP-F2203C Turbo Molecular Pump PT50-0Z-006 wor
