 MAG 40-C-N MAG 60-C-N MAG XY 40-C-N MAG XY 60-C-N
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Gonio Stage MAG XY 40-C-N
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????? ???? MAG XY 40-C-N
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??
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??
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????? ??
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40X40
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????
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±6?
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????
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Worm Gear(1/267), Cross Roller
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???
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0.0027?/Pulse(Full Step)
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?? ?? ??
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13.5?/sec[5kHz]
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??
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±0.005?
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??-?????
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±1um
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??-?????
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±2um
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???????
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25"
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???????
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20"
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???(mm)
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0.02"
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?? ???(mm)
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0.01"
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???(mm)
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0.005
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???(Kg)
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3
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?? ??
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PMM33BH2-C49(5P STEP)
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??(Kg)
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0.4
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???? ??
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DFC5107-P
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?? ??
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1?? ??, 2 ?? ??
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??? ???
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HR-10A-10J-12P(HRS)
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